Platform — Integration

Native SECS/GEM. No middleware layer.

GEM E30-compliant host communication with direct S6F11 defect event push to your MES. Qualifies in standard ATC test framework in 2–3 days.

SECS-II S6F11 — Equipment Event Report
S6F11
<L 3
  <U4 1>              ; DataID
  <U4 201>            ; CEID: InspectionComplete
  <L 1                   ; Reports list
    <L 2
      <U4 301>          ; RPTID: DefectReport
      <L 3
        <A "W-29A-0471"> ; WaferID
        <U2 13 8>         ; Die X/Y coords
        <A "PART-LG">    ; DefectClass
      >
    >
  >
>
Protocol Support

What the integration layer handles

Both transport protocols and the full GEM E30 state machine are implemented natively. No external SECS/GEM library licenses required.

HSMS-SS over Ethernet

High-speed SECS message services (SEMI E37) over TCP/IP. Preferred for modern 300mm tools. Configurable port, IP, and timeout. Passive mode (equipment waits for host connect) and active mode supported.

SECS-II RS-232

RS-232 serial transport for legacy equipment stacks still using hardwired SECS-II. Baud rate, parity, and stop bit configurable. Required for older 200mm infrastructure.

GEM E30 State Machine

Full GEM compliance: all required communication states, equipment constants (EC), status variables (SV), alarm management, and remote control. SEMI E30 compliance verification report available on request.

ATC Qualification Support

Pre-configured ATC test sequences for common MES vendors. Typical qualification timeline: 2–3 days with your integration engineer on-site. Remote qualification support available via secure screen-share.

Event Coverage

Pre-configured GEM events

Standard event map shipped with the system. Additional events can be configured through the recipe editor without engineering engagement.

CEID Event Name Trigger Data Payload
201 InspectionComplete Each wafer exit WaferID, DefectCount, DefectMap
202 DefectThresholdExceeded Defect count > recipe limit WaferID, DefectClass, Count, Threshold
203 LotComplete Lot last wafer exit LotID, WaferCount, LotYieldSummary
204 RecipeChange Active recipe switched RecipeID, ProcessNode, Layer
205 SystemAlarm Hardware/software fault AlarmID, Severity, Description

Download the SECS/GEM Integration Checklist

Complete ATC qualification procedure with host configuration, event subscription setup, and MES push verification steps.

Get Integration Checklist Talk to Integration Engineer