Platform — Throughput

120 wafers/hour. Zero inspection bottleneck.

The parallel inference pipeline processes each die frame in under 8ms. Even at 300mm wafer sizes with 1000+ die per wafer, inspection never holds the line.

THROUGHPUT MONITOR — Tool T47-B
Current Rate122 wph
Avg Die Latency7.2ms
GPU Queue Depth 3 / 64 frames
Sensor Wait States 0.00%
Shift Uptime 99.8%
120
Wafers / Hour
<8ms
Per-die Latency
0%
Sensor Wait States
99.8%
Shift Uptime
Pipeline Architecture

How parallelism prevents wait states

The inspection pipeline separates sensor capture, frame queuing, inference, and result dispatch into independent stages. Each stage runs concurrently — the sensor never waits for inference to finish.

1
Frame Capture

Optical sensor captures die image frames at trigger intervals. Frame metadata (wafer ID, die X/Y, recipe ID) appended at capture time.

<1ms / frame
2
Pre-processing Queue

Frames normalized and batched (batch size 16). Queue depth stays below 5% fill at rated throughput — burst capacity up to 200 frames.

async
3
Parallel GPU Inference

Batched frames distributed across GPU workers. Each worker processes one batch independently. Results returned to ordered result buffer.

6–8ms / die
4
Result Dispatch

Defect classifications committed to local database and pushed via SECS/GEM S6F11 events. Full wafer map available at lot completion.

<1ms / result
Scaling

Multi-GPU configurations

The standard unit ships with a two-GPU configuration rated for 120 wafers/hour. For higher-throughput fabs or 12-inch wafers with high die count, a three-GPU variant supports up to 160 wafers/hour.

Throughput numbers are measured at standard 300mm fab conditions with 1024-die wafer density. Actual throughput varies with die size, optical step count, and tool configuration.

CONFIGURATION TABLE
ConfigGPUsMax wphDie/hr
Standard120122,880
Extended160163,840
Evaluation7071,680

*At 1024 die/wafer, 300mm standard. Measured values, not projections.

Verify throughput on your process configuration

Share your wafer spec, die count, and inspection step count — we'll provide a throughput projection specific to your configuration before evaluation.