Platform — Module 3
SECS/GEM native integration — no custom middleware
Validated SECS/GEM II and GEM 300 protocol stack. Direct MES and APC handshake. EMI-hardened chassis. On-premises only. Zero wafer data leaves the fab network.
Protocols
Validated protocol stack
SEMI E5/E30 — Equipment Model
Full SECS-II message set implementation for equipment state reporting, lot tracking, and defect data transmission. Validated against SEMI E30 generic equipment model. Works with existing SECS host installations without driver changes.
SEMI E40/E87 — 300mm Standard
GEM 300 compliance for 300mm fab environments. SEMI E40 process job management, E87 carrier management, and E116 equipment performance tracking. Lot record closure triggered automatically at wafer map completion.
KLA Review File Format
Optional KLARF defect file output alongside SECS/GEM. Compatible with SEM automated review workflows. Defect coordinate system calibrated to match optical stage reference — no coordinate offset correction required.
Automated Material Handling
AMHS track integration via SEMI E84 carrier handoff protocol. Wafer cassette pickup and delivery coordinated with inspection completion events. No manual operator intervention required for cassette loading in AMHS environments.
Deployment
On-premises deployment architecture
Zero cloud dependency
All inference, model storage, and data logging runs on validated on-premises hardware. No outbound network calls required for operation. Software update delivery via versioned offline packages.
Air-gap compatible
Designed for complete network isolation. Works with facilities that prohibit any internet connectivity on fab floor equipment. License validation via hardware dongle — no online activation required.
EMI hardened chassis
IEC 61000-6-2 industrial immunity standard. Validated in RTP bay environments (high RF emission). Shielded cable routing included. EMI gasket sealed at all panel seams.
OEM-qualified hardware
Validated server configurations for fab-floor deployment. Qualified OS configurations: Rocky Linux 8.9, Windows Server 2022. Hardware Bill of Materials provided at purchase — no surprise substitutions.
Cleanroom class ISO 3–5
Equipment chassis rated for ISO class 3–5 cleanroom environments. Positive pressure internal airflow. Fan filter units with H14 HEPA media. Outgassing materials qualified per SEMI F47.
Fab IT qualification support
Full IQ/OQ/PQ documentation package included. Qualification protocol templates for typical 200mm and 300mm fab environments. Change control documentation compatible with ISO 9001 quality management systems.
Architecture
Three-layer integration architecture
Integration specs available on request.
Full IQ/OQ/PQ documentation, SECS/GEM message set specification, and hardware BOM are available as part of the evaluation package. Contact us with your fab's protocol stack details.