Solutions / Logic Devices
Logic device inspection at 3nm
Bridge defects, OPC errors, and overlay shift — detected at 120 wafers per hour on FinFET and Gate-All-Around process nodes.
Defect Signatures
Logic-specific defect detection
Logic foundry inspection requires detection of defects that don't appear in memory or compound semiconductor wafers. The Lenspathio classifier includes dedicated logic-device training data for each supported node.
Bridge defects
Conductive bridges between adjacent gate structures — most critical at 5nm and 3nm where pitch shrinks below 20nm. Detected via brightfield pattern comparison against reference die, not pixel-level threshold.
OPC errors
Optical proximity correction failures manifest as corner rounding, line-end shortening, or assist feature printing. Detected at pattern layer inspection before etch — allows photomask feedback loop before lot scrap.
Overlay shift
Layer-to-layer registration errors at critical contact and via levels. Lenspathio detects overlay shift signature in the patterned die image without requiring dedicated overlay metrology wafers.
FinFET fin defects
Fin collapse, missing fins, and fin height non-uniformity — visible in the epitaxial layer inspection before gate deposition. Critical catch at 7nm and below where fin dimensions are approaching silicon crystal grain boundaries.
Gate-All-Around (GAA)
Nanosheet uniformity defects, nanosheet separation failures, and inner spacer void formation — emerging defect modes for 3nm GAA transistor architecture. Dedicated classifier module added in v2.1 software release.
BEOL particles
Back-end-of-line particle contamination from CMP and metallization steps. Particularly important for multi-layer interconnect stacks in advanced logic where particle density requirements tighten with each metal layer.
Node Coverage
Validated across the logic roadmap
Logic foundry evaluation program.
Send us a 25-wafer logic lot at your target process node. We run full inspection, provide defect map, classification breakdown, and false positive count. No obligation before you see the results.