Technology / Integration
SECS/GEM integration — no custom middleware required
Validated SECS/GEM II, GEM 300 (SEMI E40/E30), AMHS E84 hooks, real-time data streaming. Works with your existing fab equipment communication infrastructure.
Protocol Stack
Complete protocol stack
SECS-II / GEM (SEMI E5/E30)
Full SECS-II message set for equipment state reporting, lot tracking, and defect data transmission. GEM equipment model compliance with Equipment Constants, Status Variables, Collection Events, and Alarms.
GEM 300 (SEMI E40/E87/E116)
300mm fab standard: E40 process job management, E87 carrier management, E116 equipment performance tracking. Automatic lot record closure at wafer map completion.
AMHS Integration (SEMI E84)
Automated carrier handoff via E84 passive carrier load port protocol. Wafer cassette pickup and delivery coordinated with inspection completion events. Supports 200mm and 300mm FOUP formats.
KLARF Output
Optional KLARF defect file output (Version 1.8 format) compatible with automated SEM review workflows. Defect coordinate system uses wafer center reference.
Real-time streaming
Die-level classification results stream to MES during wafer scan. APC systems receive defect density and type data before the lot finishes scanning.
KLA-compatible DMS output
Optional KLA-format defect management system output for fabs running KLA-based defect review infrastructure. Enables side-by-side comparison during evaluation.
Deployment
On-premises deployment — current and roadmap configurations
On-premises rack deployment
Single rack-mount server connected via dedicated 10GbE to the inspection optical unit. Full SECS/GEM stack runs on-server. Supports up to 3 concurrent inspection sessions.
- Air-gap compatible
- No cloud dependency
- IEC 61000-6-2 EMI hardened
Edge-node distributed deployment
Distributed inference across multiple edge nodes. For fabs with multiple inspection lines in separate bays where central-server cabling is impractical. Same on-premises security constraints apply.
Integration specs on request.
Full IQ/OQ/PQ documentation, SECS/GEM message set specification, and hardware BOM available as part of the evaluation package.